“High-Resolution, High-Throughput Imaging With a Multibeam Scanning Electron Microscope”, 2015 (; backlinks; similar):
Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes.
We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to 2 orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.